Design and Fabrication of High-Quality Two-Dimensional Silicon-Based Photonic Crystal Optical Cavity with Integrated Waveguides

The emergences of silicon-based photonic crystal (PhC) waveguides and two-dimensional (2D) PhC line-defect optical cavities have revolutionized the field of integrated photonics. In this paper, we design and fabricate a high-quality (high-Q) 2D silicon-based PhC optical cavity with integrated wavegu...

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Bibliografische Detailangaben

Hauptverfasser:	Sohail Muhammad, Dingwei Chen, Chengwei Xian, Jun Zhou, Zhongke Lei, Pengju Kuang, Zhe Li, Guangjun Wen, Yongjun Huang
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2024-08-01
Schriftenreihe:	Photonics
Schlagworte:	two-dimensional high-Q optical cavity PhC waveguides silicon-based integrated PhC cavity
Online-Zugang:	https://www.mdpi.com/2304-6732/11/8/753
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