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ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices

In this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and near-infrared spectral range and retain low electri...

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Autores principales: Dimitre Z. Dimitrov, Zih Fan Chen, Vera Marinova, Dimitrina Petrova, Chih Yao Ho, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken Yuh Hsu, Shiuan Huei Lin, Jenh-Yih Juang
Formato: Artigo
Lenguaje:Inglês
Publicado: MDPI AG 2021-04-01
Colección:Nanomaterials
Materias:
Al-doped ZnO
ALD technique
transparent conductive layers
PDLC structures
flexible devices
Acceso en línea:https://www.mdpi.com/2079-4991/11/4/1011
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