Effect of C2H2 flow rate on microstructure, properties, and application in micro-drilling of a-C:H films deposited by PECVD

The drilling of printed circuit board (PCB) using micro-drills is an important processing method in modern industry. A protective film with good lubricating and anti-wear properties is generally applied to improve the processing problems of micro-drills during operation. In this study, the effects o...

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Detalhes bibliográficos

Principais autores:	Beibei Ren, Yu Xia, Yanjun Chen, Yifan Su, Jia Lou, Cheng Zhang, Peng Tang, Songsheng Lin, Mingjiang Dai
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Elsevier 2024-03-01
coleção:	Journal of Materials Research and Technology
Assuntos:	A-C:H film Plasma enhanced chemical vapor deposition C2H2 flow rate Micro-drilling High hardness
Acesso em linha:	http://www.sciencedirect.com/science/article/pii/S2238785424002072
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