Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment

The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors ar...

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Detalles Bibliográficos

Principais autores:	Dariusz Korzec, Florian Hoppenthaler, Anatoly Shestakov, Dominik Burger, Andrej Shapiro, Thomas Andres, Simona Lerach, Stefan Nettesheim
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2021-05-01
Series:	Plasma
Assuntos:	atmospheric plasma resonant piezoelectric transformer piezoelectric direct discharge plasma arrays surface treatment
Acceso en liña:	https://www.mdpi.com/2571-6182/4/2/19
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