Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Abstract Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive...

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Detalhes bibliográficos

Principais autores:	Andam Deatama Refino, Nursidik Yulianto, Iqbal Syamsu, Andika Pandu Nugroho, Naufal Hanif Hawari, Alina Syring, Evvy Kartini, Ferry Iskandar, Tobias Voss, Afriyanti Sumboja, Erwin Peiner, Hutomo Suryo Wasisto
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Nature Portfolio 2021-10-01
coleção:	Scientific Reports
Acesso em linha:	https://doi.org/10.1038/s41598-021-99173-4
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