Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer

This paper presents a deep neural network (DNN) based design optimization methodology for dual-axis microelectromechanical systems (MEMS) capacitive accelerometer. The proposed methodology considers the geometric design parameters and operating conditions of the MEMS accelerometer as input parameter...

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Detalhes bibliográficos

Principais autores:	Fahad A. Mattoo, Tahir Nawaz, Muhammad Mubasher Saleem, Umar Shahbaz Khan, Amir Hamza
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2023-04-01
coleção:	Micromachines
Assuntos:	deep neural network dual-axis MEMS accelerometer microelectromechanical systems (MEMS) multiresponse optimization deep learning (DL) neural network
Acesso em linha:	https://www.mdpi.com/2072-666X/14/4/817
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