Wafer-Scale Characterization of 1692-Pixel-Per-Inch Blue Micro-LED Arrays with an Optimized ITO Layer

Wafer-scale blue micro-light-emitting diode (micro-LED) arrays were fabricated with a pixel size of 12 μm, a pixel pitch of 15 μm, and a pixel density of 1692 pixels per inch, achieved by optimizing the properties of e-beam-deposited and sputter-deposited indium tin oxide (ITO). Although the sputter...

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Bibliographic Details

Main Authors:	Eun-Kyung Chu, Eun Jeong Youn, Hyun Woong Kim, Bum Doo Park, Ho Kun Sung, Hyeong-Ho Park
Format:	Artigo
Language:	Inglês
Published:	MDPI AG 2024-04-01
Series:	Micromachines
Subjects:	micro-light-emitting diode indium tin oxide wafer-scale characterization high pixel-per-inch
Online Access:	https://www.mdpi.com/2072-666X/15/5/560
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