A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors
Abstract As one of the most common spatial light modulators, linear micromirror arrays (MMAs) based on microelectromechanical system (MEMS) processes are currently utilized in many fields. However, two crucial challenges exist in the fabrication of such devices: the adhesion of silicon microstructur...
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| Autori principali: | , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Nature Publishing Group
2024-05-01
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| Serie: | Microsystems & Nanoengineering |
| Accesso online: | https://doi.org/10.1038/s41378-024-00679-4 |
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