Femtosecond Laser Filamentation for Precision Sapphire Dicing: Evolution of Damage Morphology and Sacrificial-Layer-Assisted Optimisation

To address the critical challenges of edge chipping and poor processing quality in sapphire precision dicing, this paper proposes a femtosecond laser filamentation-guided dicing technology. By systematically investigating the influence of pulse overlap rate, energy, and scan counts on damage evoluti...

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Detalhes bibliográficos

Principais autores:	Yaya Zhao, Ziyue Wang, Jia Liu, Haiyang Wang, Guowen An, Qianyu Ren, Pinggang Jia
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2026-06-01
coleção:	Applied Sciences
Assuntos:	ultrafast laser processing femtosecond laser filamentation precision dicing sapphire sample preparation paradigm
Acesso em linha:	https://www.mdpi.com/2076-3417/16/11/5474
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