AlScN Thin Films for the Piezoelectric Transduction of Suspended Microchannel Resonators
Suspended microchannel resonators (SMRs) are powerful tools for mass, density, and viscosity sensing. Among various transduction methods, full piezoelectric transduction offers key advantages, including on-chip integration, low energy dissipation, and linear response. This work explores sub-200 nm A...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2025-08-01
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| coleção: | Sensors |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/1424-8220/25/17/5370 |
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