Non-initial overlap bulk silicon comb-drive actuator with low-voltage and large-displacement
Two different kinds of bulk-Si comb-drive actuators are designed in this work: initial overlap comb-drive actuator and non-initial overlap comb-drive actuator. They are fabricated by a simple post-CMOS bulk micromachining process. A cascade folded beam is designed to achieve large displacement at lo...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
EDP Sciences
2016-01-01
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| coleção: | MATEC Web of Conferences |
| Acesso em linha: | http://dx.doi.org/10.1051/matecconf/20165412003 |
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