Formation OF ZINC OXIDE THIN FILMS BY COMBINED METHOD OF HYDROTHERMAL AND LAYERED ATOM DEPOSITION

Properties and deposition of continuous thin zinc oxide films by chemical on the monocrystalline silicon substrates with zinc oxide seed layer formed by atomic layer deposition are studied. Obtained hybrid zinc oxide structures consist of vertically oriented crystallites packed in uniform continuous...

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Bibliografiske detaljer

Principais autores:	E. B. Chubenko, V. P. Bondarenko, V. A. Pilipenko, K. .. Topalli, A. K. Okyay
Format:	Artigo
Sprog:	Russo
Udgivet:	Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Serier:	Доклады Белорусского государственного университета информатики и радиоэлектроники
Fag:	zinc oxide hydrothermal deposition atomic layer deposition photoluminescence x-ray diffraction
Online adgang:	https://doklady.bsuir.by/jour/article/view/665
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