Three-dimensional atomic force microscopy based on tailored cantilever probe with flared tip

In order to meet the requirements of nondestructive testing of true 3 D topography of micro-nano structures, a novel three-dimensional atomic force microscope（3 D-AFM） based on flared tip is developed. A high-precision scanning platform is designed to achieve fast servo through moving probe and samp...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	ZHANG Rui, WU Sen, XIAO Sha-sha, HU Xiao-dong, SHI Yu-shu, FU Xing
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	Publishing Center of North University of China 2020-01-01
Schriftenreihe:	Journal of Measurement Science and Instrumentation
Schlagworte:	three-dimensional atomic force microscope（3D-AFM） flared tip scanner optical lever vector scanning
Online-Zugang:	http://jmsi.publish.founderss.cn/thesisDetails?columnId=47037280&Fpath=home&index=0
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