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Design, Analysis, and Simulation of a MEMS Tuning Fork Gyroscope with a Mechanical Amplification Structure

This paper describes a novel micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) design that employs a chevron-shaped displacement mechanism to amplify the displacement generated by the Coriolis force, thereby increasing the TFG’s mechanical sensitivity. This approach was evaluated us...

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Bibliografiset tiedot
Päätekijät: Haotian Hu, Benedetta Calusi, Alvise Bagolini, Maria F. Pantano
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: MDPI AG 2025-02-01
Sarja:Micromachines
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Linkit:https://www.mdpi.com/2072-666X/16/2/195
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