Vertical and Lateral Etch Survey of Ferroelectric AlN/Al<sub>1−x</sub>Sc<sub>x</sub>N in Aqueous KOH Solutions
Due to their favorable electromechanical properties, such as high sound velocity, low dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and Aluminum Scandium Nitride (Al<sub>1−x</sub>Sc<sub>x</sub>N) thin films have achieved widespread application in radio frequency...
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| Autori principali: | , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2022-07-01
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| Serie: | Micromachines |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2072-666X/13/7/1066 |
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