Effect of ZrO2 Doping on the Properties of TiO2 Thin Films as an Ethanol Vapor Gas Sensor
In this study, RF magnetron sputtering was employed to create titanium dioxide (TiO2) thin films doped with zirconium oxide (ZrO2) (TZO) onto quartz and silicon substrates at 100oC for the purpose of evaluating the effect of ZrO2 doping on the microstructural, electrical, optical and gas sensing pro...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Iran University of Science & Technology
2026-03-01
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| Colecção: | Iranian Journal of Materials Science and Engineering |
| Assuntos: | |
| Acesso em linha: | http://ijmse.iust.ac.ir/article-1-3955-en.pdf |
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