Silicon Radiation Detector Technologies: From Planar to 3D
Silicon radiation detectors, a special type of microelectronic sensor which plays a crucial role in many applications, are reviewed in this paper, focusing on fabrication aspects. After addressing the basic concepts and the main requirements, the evolution of detector technologies is discussed, whic...
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| Автори: | , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
MDPI AG
2023-04-01
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| Серія: | Chips |
| Предмети: | |
| Онлайн доступ: | https://www.mdpi.com/2674-0729/2/2/6 |
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