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The growth mechanisms of TiO2 film onto PET surfaces by atomic layer deposition

Atomic layer deposition (ALD) was used to coat a polyethylene terephthalate (PET) polymer substrate with TiO _2 film. The TiO _2 was grown onto the surface with better film coverage by using thicker ALD deposition. Further evaluation on the coated substrates indicated that the reactive sites of –C=O...

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Autors principals: Edy Riyanto, Dedi, Ahmad Fudholi, Guo Ying, Zhang Jing, Shi Jianjun, Huang Gaoshan, Mei Yongfeng
Format: Artigo
Idioma:Inglês
Publicat: IOP Publishing 2023-01-01
Col·lecció:Materials Research Express
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Accés en línia:https://doi.org/10.1088/2053-1591/acf650
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