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Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

High-performance vector hydrophones have been gaining attention for underwater target-monitoring applications. Nevertheless, there exists the mutual constraint between sensitivity and bandwidth of a single hydrophone. To solve this problem, a four-unit array piezoelectric bionic MEMS vector hydropho...

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Principais autores: Shuzheng Shi, Xiaoyong Zhang, Zhanying Wang, Liyong Ma, Kai Kang, Yongjun Pang, Hong Ma, Jinjiang Hu
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2024-04-01
coleção:Micromachines
Assuntos:
PZT
MEMS
array vector hydrophone
bionic structure
sensitivity
Acesso em linha:https://www.mdpi.com/2072-666X/15/4/524
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