Defocus Effect Correction for Back Focal Plane Ellipsometry for Antivibration Measurement of Thin Films
Back focal plane (BFP) ellipsometry, which acquires the ellipsometric parameters of reflected light at different incident and azimuthal angles through a high-<i>NA</i> objective lens, has recently shown great potential in industrial film measurement. In on-line metrology cases for film manufacturing...
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| Glavni autori: | , , , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI AG
2023-01-01
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| Serija: | Applied Sciences |
| Teme: | |
| Online pristup: | https://www.mdpi.com/2076-3417/13/3/1738 |
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