Micro-Hotplate for Thermocatalytic Gas Sensor Fabricated by Ceramic Laser Micromachining
Thermocatalytic sensors are used as universal explosion meters for measurement of the Lower Explosive Limit (LEL) of hydrocarbon gases mixtures. Historically, thermo-catalytic sensors, with their bulky “pellistor” design, have been poorly suited for mass production using group microelectronic proces...
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| Autors principals: | , , , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2025-12-01
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| Col·lecció: | Micromachines |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2072-666X/17/1/59 |
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