ZnO and AlZnOx freestanding cantilevers toward the detection of volatile organic compounds with high selectivity and sensitivity
Abstract Nanoscale, self-actuating cantilevers are promising low-power gas sensors, but the development of different cantilever materials with optimized designs is needed to improve performance and reliability. Here we show the fabrication of cantilevers from nanoscale zinc oxide and aluminum zinc o...
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| Principais autores: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Portfolio
2026-04-01
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| Colecção: | Communications Materials |
| Acesso em linha: | https://doi.org/10.1038/s43246-026-01104-1 |
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