Optimized amorphous silicon nitride layers for the front side passivation of c-Si PERC solar cells
Plasma-enhanced chemical vapour deposition (PECVD) SiNx is the typical choice as anti-reflection coating (ARC) for Silicon based solar cells. However, there still exists a room for improvement in passivation quality of SiNx while maintaining good optics for the front side of a solar cell. In this pa...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
EDP Sciences
2020-01-01
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| coleção: | EPJ Photovoltaics |
| Assuntos: | |
| Acesso em linha: | https://www.epj-pv.org/articles/epjpv/full_html/2020/01/pv190016/pv190016.html |
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