Multilayer Nitride Coatings (TiZrNbHf)N/MoN
It is shown that at low negative bias potential applied to the substrate during the deposition (Ub lesser than 150 V), a two-phase state with the preferred orientation of crystallites can be reached for the multilayer coatings with the thickness of layers of 50 nm. This causes high hardness (up to 5...
Tallennettuna:
| Päätekijät: | , , , , , , , , , |
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| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
Sumy State University
2016-10-01
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| Sarja: | Журнал нано- та електронної фізики |
| Aiheet: | |
| Linkit: | http://jnep.sumdu.edu.ua/download/numbers/2016/3/articles/Proof_jnep_2016_V8_03045.pdf |
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