Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces
Abstract Metasurfaces consisting of artificially designed meta-atoms have been popularized recently due to their advantages of amplitude and phase of light control. However, the electron beam lithography method for metasurface fabrication has high cost and low throughput, which results in a limitati...
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| Autores principales: | , , , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Nature Publishing Group
2022-07-01
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| Colección: | Microsystems & Nanoengineering |
| Acceso en línea: | https://doi.org/10.1038/s41378-022-00403-0 |
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