Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes
We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes’ angular velocities at the same time. By...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2015-07-01
|
| Schriftenreihe: | Sensors |
| Schlagworte: | |
| Online-Zugang: | http://www.mdpi.com/1424-8220/15/7/16929 |
| Tags: |
Keine Tags, Fügen Sie das erste Tag hinzu!
|