Ridge waveguide using highly oriented BaTiO3 thin films for electro-optic application
In this work, 750 nm-thick BaTiO3 thin films with highly (0 0 1) preferred orientation were grown on single crystal MgO substrates by RF-sputtering. Hydrogen silsesquioxane (HSQ) resist material based ridge waveguides, which were fabricated on BaTiO3 thin films, were formed by e-beam lithography. Au...
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| Автори: | , , , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
Taylor & Francis Group
2014-09-01
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| Серія: | Journal of Asian Ceramic Societies |
| Предмети: | |
| Онлайн доступ: | http://www.sciencedirect.com/science/article/pii/S2187076414000505 |
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