Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits

Abstract 2D transition metal dichalcogenide semiconductor (TMDs) nanocircuits are deterministically engineered over large‐scale substrates. This original additive nanolithography approach combines large‐area physical growth of 2D TMDs layer with high resolution thermal‐scanning probe lithography, to...

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Bibliographic Details

Main Authors:	Maria Caterina Giordano, Giorgio Zambito, Matteo Gardella, Francesco Buatier de Mongeot
Format:	Artigo
Language:	Inglês
Published:	Wiley-VCH 2023-02-01
Series:	Advanced Materials Interfaces
Subjects:	additive nanolithography few‐layer MoS 2 nanocircuits Kelvin probe nanoscopy large‐area 2D TMD semiconductors thermal‐scanning probe lithography
Online Access:	https://doi.org/10.1002/admi.202201408
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