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Research on Processing Technology of Multi-Layer Heterogeneous Material Composite Micron Cantilever Beam Structure

In order to overcome the simplicity and instability of micron cantilever membrane structure, sacrificial layer technology and multi-layer heterogeneous material composite stacking technology were designated. Based on the research with respect to a multi-layer heterogeneous cantilever beam structure,...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Yingqi Shang, Hongquan Zhang, Zuofei Wu, Dongsa Chen, Shuangyu Wu
Hōputu: Artigo
Reo:Inglês
I whakaputaina: MDPI AG 2022-01-01
Rangatū:Micromachines
Ngā marau:
Urunga tuihono:https://www.mdpi.com/2072-666X/13/2/144
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