Fabrication of high-aspect-ratio and hierarchical micro/nanostructure arrays by a novel piezoelectrically actuated cutting system

Micro/nanostructure arrays have been broadly applied in numerous industrial fields, such as optics, antibacterial fields, and anti-corrosion. However, the highly efficient fabrication of micro/nanostructure arrays, especially the high-aspect-ratio and hierarchical micro/nanostructure arrays, remains...

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Detalles Bibliográficos

Principais autores:	Hanheng Du, Zhiwei Zhu, Zuankai Wang, Suet To
Formato:	Artigo
Idioma:	Inglês
Publicado:	Elsevier 2023-02-01
Series:	Materials & Design
Assuntos:	Micro/nanostructure array Ultraprecision machining Piezoelectric actuator Cutting system Vibration-assisted machining Finite element analysis
Acceso en liña:	http://www.sciencedirect.com/science/article/pii/S0264127523000758
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