A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments
A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be comp...
I tiakina i:
| Ngā kaituhi matua: | , , , , , , , , |
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| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
MDPI AG
2013-08-01
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| Rangatū: | Sensors |
| Ngā marau: | |
| Urunga tuihono: | http://www.mdpi.com/1424-8220/13/8/9896 |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
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