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Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes

This paper presents a method to simultaneously determine the thickness and permittivity of thin layers from multi-frequency reflection coefficient measurements using an open-ended coaxial probe. This is achieved by exploiting that the probe becomes radiating at frequencies higher than the probe&#821...

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Hlavní autoři: Kjetil Folgerø, Kjetil Haukalid, Jan Kocbach, Andreas Soto Peterson
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI AG 2019-04-01
Edice:Sensors
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On-line přístup:https://www.mdpi.com/1424-8220/19/8/1765
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