Low-Voltage Tri-Electrode Electrostatic Actuator Using Solid Gap-Spacing Materials
Employing a tri-electrode electrostatic actuator revealed a significant improvement in reducing the controlling voltage. However, the primary electrode fixed voltage can be a few times higher than the conventional topology. In this work, materials with relative permittivity of <i>ε</i><sub>r</sub> =...
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| Κύριοι συγγραφείς: | , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI AG
2024-03-01
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| Σειρά: | Proceedings |
| Θέματα: | |
| Διαθέσιμο Online: | https://www.mdpi.com/2504-3900/97/1/72 |
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