A Thermopile-Based Gas Flow Sensor with High Sensitivity for Noninvasive Respiration Monitoring
In this work, a N/P polySi thermopile-based gas flow device is presented, in which a microheater distributed in a comb-shaped structure is embedded around hot junctions of thermocouples. The unique design of the thermopile and the microheater effectively enhances performance of the gas flow sensor l...
Kaydedildi:
| Asıl Yazarlar: | , , , , , , |
|---|---|
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI AG
2023-04-01
|
| Seri Bilgileri: | Micromachines |
| Konular: | |
| Online Erişim: | https://www.mdpi.com/2072-666X/14/5/910 |
| Etiketler: |
Etiket eklenmemiş, İlk siz ekleyin!
|