The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering
Zinc sulfide thin films have been deposited with hydrogen in Ar and Ar+H2 atmosphere by radio frequency magnetron sputtering. The thickness, structural properties, composition, surface morphology, and optical and electrical properties of the films have been investigated. Effect of hydrogen on the pr...
Shranjeno v:
| Principais autores: | , , , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Wiley
2014-01-01
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| Serija: | International Journal of Photoenergy |
| Online dostop: | http://dx.doi.org/10.1155/2014/720560 |
| Oznake: |
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