Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier pr...
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| Главные авторы: | , , , , , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI AG
2018-08-01
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| Серии: | Micromachines |
| Предметы: | |
| Online-ссылка: | http://www.mdpi.com/2072-666X/9/9/422 |
| Метки: |
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