Neural network-based analysis algorithm on Mueller matrix data of spectroscopic ellipsometry for the structure evaluation of nanogratings with various optical constants

Accurate and fast characterization of nanostructures using spectroscopic ellipsometry (SE) is required in both industrial and research fields. However, conventional methods used in SE data analysis often face challenges in balancing accuracy and speed, especially for the in situ monitoring on comple...

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Detaylı Bibliyografya

Asıl Yazarlar:	Jung Juwon, Kim Nagyeong, Kim Kibaek, Park Jongkyoon, Cho Yong Jai, Chegal Won, Kim Young-Joo
Materyal Türü:	Artigo
Dil:	Inglês
Baskı/Yayın Bilgisi:	Wiley 2025-02-01
Seri Bilgileri:	Nanophotonics
Konular:	spectroscopic ellipsometry neural network optical constant nanostructure
Online Erişim:	https://doi.org/10.1515/nanoph-2024-0565
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