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Enhancing mechanical properties of (HfMoNbZrTa)1-xNx films through multi-phase structures in substoichiometric compositions

Elemental composition design is a common strategy for tuning the crystallographic structure of films, thereby optimizing their mechanical properties. The evolution of film structure is highly dependent on both selection and concentration of cation and anion elements. In this work, we utilized strong...

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Detalles Bibliográficos
Principais autores: Yiming Ruan, Jigang Xie, Lin He, Fugui Zhang, Jie Shi, Hengning Hu, Yun Chen, Rui Shu, Liuquan Yang, Hao Du
Formato: Artigo
Idioma:Inglês
Publicado: Elsevier 2025-01-01
Series:Journal of Materials Research and Technology
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Acceso en liña:http://www.sciencedirect.com/science/article/pii/S2238785424029375
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