Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper...

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Detalles Bibliográficos

Principais autores:	Francisco J. Azcona, Ajit Jha, Carlos Yáñez, Reza Atashkhooei, Santiago Royo
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2016-06-01
Series:	Sensors
Assuntos:	optical feedback interferometry displacement measurement nanometric resolution atomic force microscopy
Acceso en liña:	http://www.mdpi.com/1424-8220/16/7/997
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