Global fast terminal sliding mode control for a Maglev planar motor based enhanced finite-time state observer
Magnetically levitated (maglev) planar motors are widely used in precision manufacturing and micro/nano-processing owing to their vacuum compatibility, non-contact actuation, and compact structure, but nonlinear dynamics, parametric uncertainties, and load disturbances degrade positioning and trajec...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Elsevier
2025-12-01
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| Schriftenreihe: | Results in Engineering |
| Schlagworte: | |
| Online-Zugang: | http://www.sciencedirect.com/science/article/pii/S2590123025041817 |
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