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Thermal Gas Flow Sensor Using SiGe HBT Oscillators Based on GaN/Si SAW Resonators

This paper presents a thermal gas flow sensing system, from surface acoustic wave (SAW) temperature sensor to oscillation circuit and multi-module miniaturization integration. A single-port GaN/Si SAW resonator with single resonant mode and excellent characteristics was fabricated. Combined with an...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Wenpu Cui, Jie Cui, Wenchao Zhang, Guofang Yu, Di Zhao, Jingqing Du, Zhen Li, Jun Fu, Tianling Ren
Hōputu: Artigo
Reo:Inglês
I whakaputaina: MDPI AG 2025-10-01
Rangatū:Micromachines
Ngā marau:
Urunga tuihono:https://www.mdpi.com/2072-666X/16/10/1151
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