Formation of AlN Layers at Magnetron Sputtering of Aluminum in Ar + N2 Gas Mixture
The influence of technological parameters, such as discharge power, working gas pressure, growth surface temperature, on the formation mechanisms and main characteristics of aluminum nitride has been investigated in the work. On the basis of optimization of the stated technological parameters, the a...
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Sumy State University
2014-06-01
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| Col·lecció: | Журнал нано- та електронної фізики |
| Matèries: | |
| Accés en línia: | http://jnep.sumdu.edu.ua/download/numbers/2014/2/articles/jnep_2014_V6_02017.pdf |
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