A Novel Fixed-Bed Process Integrated with Additional Disproportionation Reactors for Silane Production
With the increase in the demand for electronic-grade high-purity silane in the semiconductor chip industry, it is of great significance to develop a green and economical method for silane production. Therefore, a novel energy-saving fixed-bed process was proposed innovatively. In this paper, the the...
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| Auteurs principaux: | , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI AG
2026-04-01
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| Collection: | Separations |
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| Accès en ligne: | https://www.mdpi.com/2297-8739/13/4/127 |
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