A Flow-Through Microfluidic Relative Permittivity Sensor

In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and out...

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Bibliografski detalji

Glavni autori:	Yaxiang Zeng, Remco Sanders, Remco Wiegerink, Joost Lötters
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2020-03-01
Serija:	Micromachines
Teme:	capacitance sensor interdigitated electrodes relative permittivity sensor
Online pristup:	https://www.mdpi.com/2072-666X/11/3/325
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