A ceramic-based ITON piezoresistive pressure sensor with wide temperature range (RT-900 °C) and broad frequency response
Abstract Piezoresistive pressure sensors offer high accuracy, high sensitivity, and a compact form factor, making them widely adopted in aerospace applications. However, conventional designs are constrained by sensing materials and structural limitations, hindering pressure monitoring at temperature...
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| Principais autores: | , , , , , , , , , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Nature Publishing Group
2025-12-01
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| Serija: | Microsystems & Nanoengineering |
| Online dostop: | https://doi.org/10.1038/s41378-025-01100-4 |
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