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Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

Actuators play a crucial role in microelectromechanical systems (MEMS) and hold substantial potential for applications in various domains, including reconfigurable metamaterials. This research aims to design, fabricate, and characterize structures for the actuation of the EMA. The electromagnetic ac...

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Principais autores: Shengru Zhou, Chao Liang, Ziqi Mei, Rongbo Xie, Zhenci Sun, Ji Li, Wenqiang Zhang, Yong Ruan, Xiaoguang Zhao
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2024-01-01
Serier:Micromachines
Fag:
electromagnetic actuator
MEMS
flexible polyimide
tunable terahertz metamaterial
Online adgang:https://www.mdpi.com/2072-666X/15/2/219
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