A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects
In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping results to be rarefied and, thus, not suitable to be modeled though the classical Navier-Stokes equation. The simplest way to consider fluid rarefaction is the introduction of a slight modification into its...
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| Principais autores: | , , |
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| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Gruppo Italiano Frattura
2013-01-01
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| 叢編: | Fracture and Structural Integrity |
| 主題: | |
| 在線閱讀: | http://www.gruppofrattura.it/pdf/rivista/numero23/numero_23_art_11.pdf |
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