Comparison of UV-curable materials for high-resolution polymer nanoimprint stamps

We present a systematic comparison of four resins for nanoimprint intermediate polymer stamps, the standard IPS material, OrmoStamp and two new polymers GMN-PS90 (foil) and GMN-PS40 (liquid). The new polymers are based on acrylated silane and offer sufficiently high Young's modulus and low shrinkage...

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Bibliografski detalji

Glavni autori:	Muhammad H. Asif, Mariusz Graczyk, Babak Heidari, Ivan Maximov
Format:	Artigo
Jezik:	Inglês
Izdano:	Elsevier 2022-04-01
Serija:	Micro and Nano Engineering
Teme:	Nanoimprint stamps UV-curable polymers Nanoimprint lithography High-resolution patterning
Online pristup:	http://www.sciencedirect.com/science/article/pii/S2590007222000156
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