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Preparation of Monodispersed Nanoparticles of Transparent Conductive Oxides

Generally, indium-tin-oxides (ITO) thin film is prepared by the sputtering process with ITO target, but only 20 % of ITO yielded from the target is deposited on the substrate. Namely, about 80 % ITO is exhausted by the deposition elsewhere far from the substrate. The recycling process of indium is l...

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Principais autores: Atsushi Muramatsu, Kiyoshi Kanie, Takafumi Sasaki, Masafumi Nakaya
Formato: Artigo
Idioma:Inglês
Publicado: Hosokawa Powder Technology Foundation 2016-02-01
Series:KONA Powder and Particle Journal
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Acceso en liña:https://www.jstage.jst.go.jp/article/kona/33/0/33_2016025/_html/-char/en
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