Optical Properties of a-SiC:H Thin Films Deposited by Magnetron Sputtering
In the present work a-SiC:H thin films were prepared using magnetron sputtering technique for different substrate temperatures from 100 °C to 290 °C. Their optical properties were studied using the ellipsometry technique. The experimental results show that the optical band gap of the films varies fr...
Furkejuvvon:
| Váldodahkkit: | , , |
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| Materiálatiipa: | Artigo |
| Giella: | Inglês |
| Almmustuhtton: |
MDPI AG
2025-06-01
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| Ráidu: | Electronic Materials |
| Fáttát: | |
| Liŋkkat: | https://www.mdpi.com/2673-3978/6/2/8 |
| Fáddágilkorat: |
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